Method and system for hermetically sealing packages for optics

ABSTRACT

A system for hermetically sealing devices includes a substrate, which includes a plurality of individual chips. Each of the chips includes a plurality of devices and each of the chips are arranged in a spatial manner as a first array. The system also includes a transparent member of a predetermined thickness, which includes a plurality of recessed regions arranged in a spatial manner as a second array and each of the recessed regions are bordered by a standoff region. The substrate and the transparent member are aligned in a manner to couple each of the plurality of recessed regions to a respective one of said plurality of chips. Each of the chips within one of the respective recessed regions is hermetically sealed by contacting the standoff region of the transparent member to the plurality of first street regions and second street regions using at least a bonding process to isolate each of the chips within one of the recessed regions.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.11/560,784, filed Nov. 16, 2006; which is a continuation of U.S. patentapplication Ser. No. 10/693,323, filed Oct. 24, 2003, the disclosure ofwhich is incorporated herein by reference in its entirety for allpurposes.

BACKGROUND OF THE INVENTION

This present invention relates generally to manufacturing objects. Moreparticularly, the invention provides a method and structure forhermetically bonding a transparent cover to a semiconductor substrate.Merely by way of example, the invention has been applied to atransparent glass cover hermetically bonded to a semiconductor wafercontaining a micro-mechanical electrical system. The method andstructure can be applied to display technology as well as, for example,charge coupled display camera arrays, and infrared arrays.

The packaging of silicon integrated circuits has reached a high level ofmaturity. FIG. 1 illustrates a simplified diagram of a conventionalsilicon integrated circuit package. The silicon integrated circuit die110 is mounted on a submount 115 featuring a ball grid array 120. Wirebonds 125 are attached to the silicon die 110 to provide electricalconnection to the submount 115. Typically, the silicon die 110 and thewire bonds 125 are encapsulated using a plastic encapsulant 130. Theresulting package is robust and inexpensive.

The package illustrated in FIG. 1 presents several drawbacks inapplications that often require more than electrical operation of thesilicon integrated circuit. An example of such an application is opticalreflection off an array of micro-mirrors or other MEMS structure. Forexample, these applications typically require the ability to illuminatethe top of the silicon integrated circuit with optical energy andsubsequently reflect the optical energy off the top of the siliconintegrated circuit with high efficiency. The optical properties of theplastic encapsulant, including lack of transparency, non-uniformity ofthe index of refraction, and surface roughness make these packagesunsuitable for this application. Additionally, many MEMS often requirean open space above the surface of the silicon integrated circuit toenable the micro-electro-mechanical structures to move in the directionparallel to the plane of the MEMS as well as in the directionperpendicular to the plane of the MEMS. The physical contact that theplastic encapsulant makes with the surface of the integrated circuit,therefore, make this package unsuitable for many MEMS applications.

SUMMARY OF THE INVENTION

This present invention relates generally to manufacturing objects. Moreparticularly, the invention provides a method and structure forhermetically bonding a transparent cover to a semiconductor substrate.Merely by way of example, the invention has been applied to atransparent glass cover hermetically bonded to a semiconductor wafercontaining a micro-mechanical electrical system. The method andstructure can be applied to display technology as well as, for example,charge coupled display camera arrays, and infrared arrays.

In a specific embodiment according to the present invention, a methodfor hermetically sealing devices is provided. The method includesproviding a substrate that includes a plurality of individual chips,each of the chips including a plurality of devices. In this specificembodiment according to the present invention, the chips are arranged ina spatial manner as a first array. The array configuration in thisembodiment includes a plurality of first street regions arranged instrips and a plurality of second street regions arranged in strips. Thesecond street regions intersect the first street regions to form thearray configuration. The method also includes providing a transparentmember of a predetermined thickness. The transparent member in thisembodiment includes a plurality of recessed regions within thepredetermined thickness and arranged in a spatial manner as a secondarray. Preferably, each of the recessed regions is bordered by astandoff region. In this specific embodiment, the standoff region has athickness defined by a portion of the predetermined thickness. Themethod also includes aligning the transparent member in a manner tocouple each of the plurality of recessed regions to a respective one ofsaid plurality of chips. The transparent member is aligned such that thestandoff region is coupled to each of the plurality of first streetregions and is coupled to each of the plurality of second street regionsto enclose each of the chips within one of the respective recessedregions. The method also includes hermetically sealing each of the chipswithin one of the respective recessed regions by contacting the standoffregion of the transparent member to the plurality of first streetregions and second street regions. Preferably, the hermetic sealing usesat least a bonding process to isolate each of the chips within one ofthe recessed regions.

In an alternative specific embodiment, the invention provides a systemfor hermetically sealing devices. The system comprises a substrateconfigured to include a plurality of individual chips. Each of the chipsincludes a plurality of devices. Additionally, each of the chips arearranged in a spatial manner as a first array. The array configurationincludes a plurality of first street regions arranged in strips and aplurality of second street regions arranged in strips. The second streetregions intersect the first street regions to form the arrayconfiguration. The system further comprises a transparent member of apredetermined thickness. The transparent member is configured to includea plurality of recessed regions within the predetermined thickness. Theplurality of recessed regions are arranged in a spatial manner as asecond array. Furthermore, each of the recessed regions are bordered bya standoff region having a thickness defined by a portion of thepredetermined thickness. The substrate and the transparent member arealigned in a manner to couple each of the plurality of recessed regionsto a respective one of said plurality of chips. Accordingly, thestandoff region is coupled to each of the plurality of first streetregions and is coupled to each of the plurality of second street regionsto enclose each of the chips within one of the respective recessedregions. Each of the chips within one of the respective recessed regionsis hermetically sealed by contacting the standoff region of thetransparent member to the plurality of first street regions and secondstreet regions using at least a bonding process to isolate each of thechips within one of the recessed regions.

These and other objects and features of the present invention and themanner of obtaining them will become apparent to those skilled in theart, and the invention itself will be best understood by reference tothe following detailed description read in conjunction with theaccompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified diagram of a conventional silicon integratedcircuit package.

FIG. 2 is a simplified diagram of a conventional hermetically sealedtransparent integrated circuit package.

FIGS. 3A-3D are simplified diagrams of a wafer-level hermetically sealedpackage according to an embodiment of the present invention.

FIGS. 4A and 4B are simplified diagrams of a transparent memberaccording to an embodiment of the present invention formed from twotransparent components.

FIG. 5A is a simplified top view of a transparent member and substrateaccording to an embodiment of the present invention at the time ofhermetic sealing.

FIG. 5B is a simplified diagram of four transparent members and asubstrate according to an alternative embodiment of the presentinvention at the time of hermetic sealing.

FIG. 6 is a simplified diagram of a single micro-mirror chip afterhermetic sealing according to an embodiment of the present invention.

FIG. 7 is a simplified diagram of a die level package including ahermetically sealed die according to an embodiment of the presentinvention.

FIG. 8 is a simplified diagram illustrating the operation of areflective system according to an embodiment of the present invention.

DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS

According to the present invention, techniques for manufacturing objectsare provided. More particularly, the invention provides a method andsystem for hermetically sealing packages for objects. Merely by way ofexample, the invention has been applied to the hermetic sealing of anoptical micro-mirror package. The method and system can be applied tosensor technology as well as other MEMS devices where hermetic packagingis required.

FIG. 2 illustrates a simplified diagram of a conventional hermeticallysealed transparent integrated circuit package useful for opticalillumination of a micro-mirror array. In FIG. 2, a silicon MEMS die 210featuring a micro-mirror array 215 is mounted on a submount 220. The dieis attached to the submount using die attach procedures that arecompatible with hermetically sealed packaging requirements well known tothose skilled in the art. Wire bonds 225 are attached to the silicon dieand the submount as with the package illustrated in FIG. 1.

To provide an open space above the micro-mirror array 215, a solidstandoff 230 is typically placed near the outer edge of the submount.This standoff is typically shaped as a square annulus and fabricatedfrom covar or other suitable materials. The standoff is often brazedonto the submount at contact points 235. A glass cover plate 240 istypically brazed onto the top of the standoff at contact points 245 toseal the package.

The cost of the package illustrated in FIG. 2 is typically high, in somecases around $70. Additionally, it is usually necessary to assemble thepackage in a clean room environment to prevent potential handling damageand contamination. Thus, there is a need for an improved method andsystem for hermetically sealing packages for objects.

FIGS. 3A-3D are simplified diagrams of a wafer-level hermetically sealedpackage according to an embodiment of the present invention. Thesediagrams illustrate examples according to specific embodiments. One ofordinary skill in the art would recognize various modifications,alternatives and variations. Preferably, formation of the package occursprior to separation of the active devices into die form. Here,separation often occurs using a dicing and/or scribing and breakingprocess, among others. Additional details of the present method areprovided throughout the present specification and more particularlybelow.

In the embodiment illustrated in FIG. 3A, a substrate 310 is processedaccording to methods to form an array of individual chips 315 on asubstrate. In an embodiment according to the present invention, thesubstrate 310 is a CMOS semiconductor wafer, for example, Si, and thechips 315 are MEMS. An example of one way of forming these MEMS isdescribed in U.S. Patent Application Ser. No. 60/390,389, commonlyowned, and hereby incorporated by reference for all purposes. In theembodiment illustrated in FIG. 3A, the chips include a plurality ofdevices. Additionally, the CMOS wafer is processed to form integratedcircuits 312, metal traces for electrical leads 314, and other CMOSstructures. In an embodiment according to the present invention, thedevices are micro-mirrors arranged in a multi-dimensional array, e.g.,two-dimensional array. In alternative embodiments, the plurality ofdevices comprise a plurality of charge coupled devices (CCD), aplurality of deflection devices, a plurality of sensing devices, anintegrated circuit device, any combination of these, and the like.

In the embodiment illustrated in FIG. 3B, a transparent member 320 isprovided that includes a plurality of recessed regions 325 in the lowersurface of the transparent member. The transparent member has apredetermined thickness 330. In an embodiment according to the presentinvention, the thickness of the transparent member is 1.2 mm.Alternatively, the thickness ranges from about 0.5 mm to about 3 mm inother embodiments. Of course, the thickness will depend upon theparticular applications.

Preferably, the recessed region is a volume defined within a member. Thevolume has a depth 322 defined by the distance from the bottom of thetransparent member 324 to the top of the recessed region 339. The outeredges of the recessed region are defined by the vertical edges ofstandoffs 335. In an embodiment according to the present invention, thevolume of the recessed regions is uniform across the transparent member.

According to an embodiment of the present invention, the individualstandoffs 335 comprise an annular rectangular ring with height 322oriented in a plane parallel to the x-y plane. The lower surface of thestandoff is prepared, in an embodiment according to the presentinvention, to mate to the substrate and form a bond sufficient to form ahermetically sealed package, as is discussed in detail below.

In embodiments according to the present invention, the depth of therecessed region is a predetermined depth. In the embodiment illustratedin FIG. 3B, the depth 322 of the recessed regions is 0.5 mm.Alternatively, the depth ranges from about 0.1 mm to about 1 mm in otherembodiments. Of course, the depth of the recessed region will depend onthe particular applications. Additionally, in embodiments according tothe present invention, the area of the individual recessed regions willbe a predetermined size. In the embodiment illustrated in FIG. 3B, thearea of the individual recessed regions is about 14 mm×18 mm. Dependingon the specific applications, this area may vary in size.

The recessed regions formed in the transparent member are arranged in aspatial manner to form a multi-dimensional array in the x-y plane. Insome embodiments according to the present invention, the recessedregions are arranged to form a two-dimensional array in the x-y plane.In the embodiment illustrated in FIGS. 3A-3D, the depth and the x-ydimensions of the recessed regions 325 are greater than the height andthe x-y dimensions of the chips 315. Accordingly, the chips fit withinthe recessed regions and the edges of the recessed regions are separatedfrom the outer edges of the chips in all three dimensions. Moreover, inthe embodiment illustrated in FIGS. 3A and 3B, the center-to-centerspacing of the recessed regions in both the x and y dimensions exceedsthe size of the recessed regions in both the x and y dimensions,respectively, providing space for the standoff regions 335 betweenadjacent chips. The lateral dimension of the standoff regions have apredetermined size. In an embodiment according to the present inventionthe lateral dimension of the standoff region ranges between 0.5 mm and1.0 mm.

In an embodiment according to the present invention, the transparentmember is formed from a product sold under the name of Corning®Eagle²⁰⁰⁰™ display grade glass substrate manufactured by CorningIncorporated of Corning, N.Y. The glass substrate is characterized byhigh optical quality, including, but not limited to, optical powertransmittance in the visible region of greater than 90%. Thetransmittance of light through the member can be increased by theapplication of anti-reflection (AR) coatings to the optical surfaces ofthe substrate, as disclosed below. Additionally, Corning® Eagle²⁰⁰⁰™display grade glass is used in some embodiments according to the presentinvention because the coefficient of thermal expansion of the glasssubstrate is close to the coefficient of thermal expansion of Si.

For a material, by definition, the thermal strain at temperature T isthe change in length of a member, due to a change in temperature,(T−T_(ref)), divided by the original length l of that member. Denotingthermal strain at temperature T as e_(T)(T), $\begin{matrix}{{e_{T}(T)} = {\frac{\Delta\quad l_{thermal}}{l}.}} & (1)\end{matrix}$

Also, by definition, the coefficient of thermal expansion for amaterial, denoted as α(T) is, $\begin{matrix}{{\alpha(T)} = {\frac{\mathbb{d}e_{T}}{\mathbb{d}T}.}} & (2)\end{matrix}$

In embodiments according to the present invention in which temperaturevariation as a function of time is expected, it is useful to match thecoefficient of thermal expansion (CTE) of the transparent cover to theCTE of the substrate. The matching of these CTEs limits the amount ofwarping and stress introduced in the substrate due to temperaturevariation.

In the embodiment illustrated in FIGS. 3A-3D, the transparent member isdesigned and fabricated to reduce optical absorption and therebyincrease the transmission of optical energy at the wavelength range ofinterest. In an embodiment according to the present invention, thewavelength range of interest is the visible spectrum between 400 and 700nm. Additionally, in this embodiment, the top surface of the member 337and the top surface of the recessed regions 339 are polished or finishedto provide optical quality surfaces. Moreover, AR coatings may beapplied to the top surface of the transparent member and the top surfaceof the recessed regions. The AR coatings applied to the top surface ofthe transparent member will reduce the amount of light reflected off thetop of the transparent member as it impinges on the package and therebyincrease the amount of light that reaches the micro-mirror array 315.Moreover, AR coatings applied to the top of the recessed regions willreduce the amount of light reflected off the transparent member as itleaves the package. Overall system throughput will be increased by theuse of these AR coatings. Quarter wave (λ/4) coatings of MgF₂ or othersuitable dielectric materials can be used to form broadband AR coatings.For example, a λ/4 MgF₂ coating centered at 550 nm (with an index ofrefraction of 1.38 at 550 nm) deposited on a Corning® Eagle²⁰⁰⁰™ displaygrade glass substrate, results in a power reflectance less than 2% persurface across the visible spectrum (400-700 nm).

The transparent member can be worked to form the recessed regions in avariety of ways. For example, in one embodiment according to the presentinvention, the recessed regions can be etched into the transparentmember by the use of dry or wet chemical etching, laser machining,acoustic machining, water jet machining, or the like.

In an alternative embodiment according to the present invention, thetransparent member is formed by machining a first planar component andsubsequently bonding a separate transparent component to the firstcomponent as illustrated in FIG. 4. The first planar component 410 is aplanar substrate that is machined or otherwise worked to form openingsat locations in which recessed regions 415 are to be positioned.Additional openings are formed at positions 417 to form through holesused for attachment of wire bonds to the chip interconnect region, aswill be described below. Unmachined areas of the first planar componentwill form the standoff regions 420. A second, planar transparentcomponent 430 is bonded to the top of the first planar component to formthe completed transparent member. In a specific embodiment according tothe present invention, the first planar component and the second planartransparent component are both transparent. A side view of the completedtransparent member taken along the plane A-A of FIG. 4A is illustratedin FIG. 4B. As illustrated in FIG. 4B, the standoff regions 420 and thetop transparent component 430 are illustrated.

One of the benefits provided by this alternative fabrication process isthat the optical properties of the two components are not alwayssimilar. In fact, for some applications, the optical properties of thefirst component illustrated in FIGS. 4A and 4B do not impact systemperformance. For example, depending on the optical path through thepackage, light may never impinge on the first component. In otherembodiments according to the present invention, it is desirable toabsorb any light that does impinge on the lower component.

In an embodiment according to the present invention, the opticalproperties of the transparent member are predetermined. In a specificembodiment, the transmittance and absorption coefficient of thetransparent member are uniform as a function of position in the x-yplane.

In an embodiment according to the present invention, the bonding of thetwo transparent components is accomplished by low temperature glass fritbonding or other methods known to those of skill in the art.Additionally, AR coatings are applied to the top and bottom of thesecond transparent component prior to bonding to increase opticalthroughput. As discussed above, in this embodiment according to thepresent invention, the optical quality of the second transparent memberwill control the optical quality of light passing through the top of therecessed regions, enabling the use of polishing and coating methods notapplicable to embodiments in which the transparent member is formed froma single substrate.

In an embodiment according to the present invention, hermetically sealeddie-level packages are formed by coupling the transparent member to thesubstrate. FIG. 3C is a simplified diagram of the transparent member andthe substrate at the time of hermetic sealing. The transparent member isaligned in a manner to position the standoff regions 340 and 342 abovethe street regions 344 and 346. The individual chips 350 are locatedbelow and in communication with an associated recessed region 352 andhermetically sealed by the transparent cover 354 at contact points 356located at the base of the standoff regions 342. Through holes 348provide access to bond pads 358 located on the CMOS wafer.

Hermetic sealing of the transparent member to the substrate is performedaccording to several methods well known to those skilled in the art. Forexample, in an embodiment according to the present invention, hermeticsealing is performed by plasma activated covalent wafer bonding (PACWB).PACWB is performed at room temperature after the substrate andtransparent member have been cleaned, for example, in SC1 (NH₃:H₂O₂:H₂O,1:4:20) at 60° C., rinsed in de-ionized (DI) water, dipped in 2% HF for20 seconds, rinsed in DI water and dried with N₂ or air. The substrateand transparent member are then exposed, for example, to an oxygenplasma in a reactive ion etcher at a chamber pressure of about 35 mTorr.In an alternative embodiment according to the present invention, thesubstrate and transparent member are exposed to an argon plasma. Afterplasma treatment, the surface of the silicon oxide is hydrophilic,promoting bonding. The substrate and the transparent member are broughtinto contact at room temperature in a preselected ambient environment.In alternative embodiments according to the present invention, otherbonding techniques are used, for example, eutectic low temperaturebonding and anodic bonding.

In an embodiment according to the present invention, the hermeticsealing process illustrated in FIG. 3C is performed in an environmentcomprising inert gases. Examples of inert gases are N₂ and Ar, amongothers. The benefits provided by hermetic sealing in an inertenvironment include, but are not limited to dampening of oscillationspresent in the devices and the prevention of electrical arcing. Forexample, if the devices are micro-mirrors arranged in an array,oscillations present during operation and motion of the micro-mirrorsare damped and attenuated by the presence of the inert gas.Additionally, the possibility of electrical arcing between the elementsof the micro-mirror array and/or the drive electronics is reduced by thepresence of the inert gas.

FIG. 5A is a top-view of the device illustrated in FIG. 3C at the timeof hermetic sealing. The standoff regions 510 running in the y-directionare located above the parallel street regions 512 and the standoffregions 515 running in the x-direction are located above the parallelstreet regions 517. Bond pads 520 are located at the right and leftsides of the active devices 522. As illustrated in FIG. 3C, throughholes 348 in the transparent member provide access to the bond pads.

In an embodiment according to the present invention, the hermeticsealing process is performed by bonding a single transparent member to asingle substrate. In this embodiment, the size of the single transparentmember is selected to correspond to the size of the substrate. Forexample, a transparent member approximately 30 cm in width and length isbonded to a substrate 30 cm in diameter. Alternatively, the transparentmember may be rectangular and larger in size than the substrate. In analternative embodiment according to the present invention, the size ofthe transparent substrate is only a fraction of the substrate size. Inthis alternative embodiment, before hermetic sealing, multipletransparent members are arranged to align with matched areas on thesubstrate surface. The multiple transparent members are subsequentlybonded to the substrate. For example, FIG. 5B illustrates a simplifieddiagram of four transparent members 552, 554, 556, and 558 arranged in atwo-dimensional array above an array of chips 560 located on thesubstrate. In the alternative embodiment illustrated in FIG. 5B, thetransparent members are manufactured so that adjacent transparentmembers abut each other at planes 570 and 572. However, this is notnecessary. Additional alternative embodiments according to the presentinvention may align the transparent members differently.

FIG. 3D illustrates, according to an embodiment of the presentinvention, the separation of individual dies after hermetic sealing iscompleted. In the embodiment illustrated in FIG. 3D, the individual dies360 are separated along lines running in the y-direction located betweenadjacent bond pads. In the x-direction, the dies are separated to alignthe plane of separation with the through holes 362 located in thetransparent member outside of the recessed region 364. For comparison,the lines in the y-direction and x-direction are illustrated in FIG. 5Aas lines 530 and 535, respectively.

In a specific embodiment according to the present invention, theindividual dies are separated by cutting the substrate into dies using adiamond saw. In an alternative embodiment, the dies are separated byscribing the substrate using a diamond scribe. In an embodiment of theinvention in which the substrate is a silicon wafer, the die separationis performed by sawing the silicon substrate with a rotating circularabrasive saw blade.

FIG. 6 is a top-view of a single die according to an embodiment of thepresent invention. The lateral dimensions of the chip and recessedregion are predetermined sizes. In the embodiment illustrated in FIG. 6,the lateral dimensions of the chip 610 is about 17 mm by 13 mm. Thecenter to center spacing of the chip is about 21 mm in the x-directionand 17 mm in the y-direction. The chip in this specific embodimentcomprises a 1024×768 array of micro-mirrors 615. The edges of themicro-mirrors are separated from the standoff regions 620 in the x and ydirections by a distance of 0.5 mm. The standoff regions are 0.5 mm inwidth. Through holes 625 and 627 to the left and right of the standoffregions, respectively, provide access to bond pads 630 100 μm in sizeand set on a 150 μm pitch. Alternatively, the center to center spacingof the chip 610 is 16 mm×12 mm, resulting in a separation between thechip and the standoff regions of 0.25 mm. Of course, these dimensionswill depend upon the particular applications.

In an embodiment according to the present invention, the surfaceroughness of the standoff regions that come in contact with thesubstrate is reduced to a predetermined level. An Atomic ForceMicroscopy (AFM) is typically used to characterize the surface roughnessof the lower surface of the standoff region. For example, a DigitalInstruments EnviroScope™ from Veeco Instruments, Inc. can be used.

For example, in a specific embodiment according to the presentinvention, the root mean square surface roughness of the lower surfaceof the standoff regions is less than or equal to 2 Å for a 2 μm by 2 μmarea. In alternative embodiments according to the present invention, thesurface roughness is about 3 Å RMS over a 2 μm by 2 μm area.

FIG. 7 is a simplified diagram of a die level package useful for makingelectrical connection to a hermetically sealed package and mounting thepackage according to an embodiment of the present invention.

FIG. 7 illustrates an embodiment according to the present invention inwhich the hermetically sealed package is mounted on a lead framestructure, such as a ball grid array. The separated CMOS die, chip, andhermetically sealed package previously described are illustrated as 705.In an embodiment according to the present invention, at least oneinterconnect region is associated with each chip on the substrate. Inthe embodiment illustrated in FIG. 7, the interconnect region or bondingpads 710 are located, for example, on or near the top surface of thewafer. In an embodiment according to the present invention, theinterconnect pads are electrically connected to the plurality of devicesto actuate the mechanical devices according to a MEMS algorithm. Thus,electrical signals presented at the interconnect region 710 result inmechanical motion of the devices 715. As disclosed previously, in aspecific embodiment according to the present invention, the electricalsignals presented at the interconnect region 710 deflect some or all ofthe micro-mirrors present in the micro-mirror array to preferentiallyreflect light passing through the transparent member 717 and incident onthe micro-mirror array.

In order to electrically connect the interconnect region (and thus thedevices) to external drivers, wire bonds 720 are connected from theinterconnect pads 710 to electrical connections located on the leadframe structure 725. In an embodiment according to the presentinvention, the wire bonds are made using Au wires about 25 μm indiameter, which are capable of carrying in excess of 500 mA of current.In the embodiment according to the present invention illustrated in FIG.7, the wire bonds are encapsulated in encapsulant 730. The use ofencapsulants, for example, plastic, to protect electrical componentsfrom environmental damage is well known to those skilled in the art. Thelead frame, in some embodiments, is brazed onto a heat spreader 742 toreduce the thermal load on the hermetically sealed package.

In FIG. 7, the encapsulant is applied to encapsulate at least a portionof the lead frame, the wire bonds, the interconnect regions, and thesides of the transparent member adjacent the through holes, whilemaintaining a surface region 735 of the transparent member located abovethe recessed region free from encapsulant. Thus, the optical propertiesof the surface region 735 are unaffected by the application of theencapsulant. In the embodiment illustrated in FIG. 7, the totalthickness 740 of the die level package is 1.27 mm. Thus, the packageillustrated in FIG. 7 combines both a hermetically sealed package usefulfor optical MEMS and a non-hermetically sealed plastic encapsulatedpackage.

FIG. 8 illustrates the operation of a reflective system employing aspecific embodiment of the present invention. In embodiments accordingto the present invention, it is desirable to spatially filter lightincident on and reflected from the package. In the embodimentillustrated in FIG. 8, a beam of light from a light source 810 isincident on the top surface of the transparent member 815. A portion ofthe light 830 passing through the transparent member is incident on thesurface of the plurality of devices, in this embodiment, a micro-mirrorarray 820. Another portion of the light 835 from the lamp 810 is blockedor filtered by filter mask 825 located at the periphery of thetransparent member. Light blocked by the left, top and bottom sides offilter mask 825 is not able to reach the micro-mirror array. Inaddition, light reflected off portions of the chip other than themicro-mirror array is blocked by the right side of the filter mask.Thus, by the use of filter mask 825, the reflected light passing todetector 840 is limited to a selected portion of the original beam thatis incident on the package.

In the embodiment illustrated in FIG. 8, the filter mask is located onthe upper surface of the transparent member, however, this is notrequired. In alternative embodiments, the filter mask is located on thelower surface or sides of the transparent member. In an additionalembodiment according to the present invention, the use ofnon-transparent materials in the fabrication of the transparent membercan complement the filter mask. In an embodiment according to thepresent invention, the filter mask comprises a layer of chrome. Inalternative embodiments, the filter mask is made from other reflectiveor absorptive materials.

In the embodiment illustrated in FIG. 8, the filter mask forms anaperture region that blocks light from impinging on or reflecting fromportions of the die other than the micro-mirror array. In alternativeembodiments, the filter mask is only used to block light on the incident(left) side and not on the exit (right) side of FIG. 8.

While the above is a complete description of specific embodiments of theinvention, the above description should not be taken as limiting thescope of the invention as defined by the claims.

1. A system for hermetically sealing devices, the system comprising: asubstrate comprising: a plurality of individual chips, wherein each ofthe plurality of individual chips includes a plurality of devices andwherein each of the plurality of individual chips is arranged in aspatial manner as a first array configuration, the first arrayconfiguration including a first separation region extending in a firstdirection between each of the plurality of individual chips and a secondseparation region extending in a second direction between each of theplurality of individual chips, the first direction being oriented at anangle with respect to the second direction; and one or more bond padslocated in the first separation region and the second separation region,wherein each of the one or more bond pads are associated with each ofthe plurality of individual chips and are in electrical communicationwith the plurality of devices in each of the plurality of individualchips; a transparent member of a predetermined thickness, thetransparent member including a plurality of recessed regions within thepredetermined thickness, wherein the plurality of recessed regions arearranged in a spatial manner as a second array, and wherein each of theplurality of recessed regions are bordered by a standoff region having athickness defined by a portion of the predetermined thickness; and ahermetically sealed interface between the standoff region and the firstseparation region and the second separation region, wherein thehermetically sealed interface is adapted to enclose each of theplurality of individual chips within one of the plurality of recessedregions and maintain the one or more bond pads at a location external tothe one of the plurality of recessed regions.
 2. The system of claim 1wherein each of the first separation regions has a first width rangingfrom about 0.5 mm to 1.0 mm in dimension and each of the secondseparation regions has a second width ranging from about 0.5 mm to 1.0mm in dimension.
 3. The system of claim 1 wherein the angle is about90°.
 4. The system of claim 1 wherein the transparent member has anoptical power transmittance of greater than about 99%.
 5. The system ofclaim 1 wherein the transparent member is characterized by a coefficientof thermal expansion α_(T), the coefficient of thermal expansion isabout the same as a coefficient of thermal expansion α_(S) of thesubstrate.
 6. The system of claim 1 wherein the transparent membercomprises an antireflective coating disposed overlying surface regionsof each of the plurality of recessed regions.
 7. The system of claim 1wherein the transparent member comprises a first transparent memberoverlying a second transparent member including the standoff region. 8.The system of claim 1 wherein the transparent member is characterized bya thickness ranging from about 0.1 mm to 1.2 mm.
 9. The system of claim1 wherein each of the plurality of individual chips is maintained withinan inert environment within the one of the plurality of recessedregions.
 10. The system of claim 9 wherein the inert environment isselected from nitrogen, argon, or a mixture of nitrogen and argon. 11.The system of claim 1 wherein the substrate comprises a silicon bearingmaterial.
 12. The system of claim 1 wherein each of the plurality ofrecessed regions comprises a first surface region opposing a secondsurface region, at least one of the first surface region or the secondsurface region being characterized by a root mean square surfaceroughness of less than or equal to 2 Å for a 2 μm by 2 μm area.
 13. Thesystem of claim 1 wherein each of the plurality of recess regions has adepth of about 0.5 mm and less.
 14. The system of claim 1 wherein thetransparent member comprises a first side and a second side, the firstside being parallel to the second side, the first side and the secondside being coated with an antireflective material.
 15. The system ofclaim 1 wherein each of the plurality of recessed regions has aperipheral region that forms an aperture region overlying a portion ofone of the plurality of individual chips.
 16. A MEMS package adapted forwafer level probing of MEMS devices, the MEMS package comprising: asubstrate comprising: a plurality of MEMS chips, each of the pluralityof MEMS chips including a plurality of devices, the plurality of MEMSchips being arranged in a spatial manner as a first array configuration,the first array configuration including a first separation regionextending in a first direction between each of the plurality ofindividual chips and a second separation region extending in a seconddirection between each of the plurality of individual chips, the firstdirection being oriented at an angle with respect to the seconddirection; and one or more bond pads located adjacent to each of theplurality of MEMS chips, wherein the one or more bond pads are inelectrical communication with the plurality of devices in each of theplurality of MEMS chips; and a transparent member of a predeterminedthickness, the transparent member comprising: a plurality of recessedregions within the predetermined thickness, wherein the plurality ofrecessed regions are arranged in a spatial manner as a second arrayaligned with the first array configuration, and wherein each of theplurality of recessed regions are bordered by a standoff region joinedto the substrate, the standoff region having a thickness defined by aportion of the predetermined thickness; and one or more access regionspassing through the transparent member and providing wafer level probingaccess to the one or more bond pads.
 17. The MEMS package of claim 16wherein an interface between the standoff region and the substratecomprises a hermetic seal.
 18. The MEMS package of claim 16 wherein eachof the plurality of MEMS chips are hermetically sealed within one of theplurality of recessed regions.
 19. The MEMS package of claim 16 whereinthe plurality of devices comprises at least one of charge coupleddevices, sensing devices, or integrated circuit devices.
 20. The MEMSpackage of claim 16 wherein the plurality of devices comprise deflectiondevices.
 21. The MEMS package of claim 20 wherein the deflection devicescomprise micro-mirror structures.
 22. The MEMS package of claim 16wherein the one or more bond pads comprise a first set of bond padslocated adjacent a first side of each of the plurality of MEMS chips.23. The MEMS package of claim 22 further comprising a second set of bondpads located adjacent a second side of each of the plurality of MEMSchips, the second side being opposite to the first side.
 24. The MEMSpackage of claim 22 further comprising one or more additional sets ofbond pads, each of the one or more additional sets of bond pads beinglocated adjacent an additional side of each of the plurality of MEMSchips, the additional side being oriented 90° with respect to the firstside.
 25. The MEMS package of claim 16 wherein one or more accessregions comprise a plurality of holes passing through the transparentmember.
 26. The MEMS package of claim 16 wherein the one or more bondpads are located in at least one of the first separation region or thesecond separation region.
 27. The MEMS package of claim 16 wherein thetransparent member comprises an antireflective coating disposedoverlying surface regions of each of the plurality of recessed regions.28. The MEMS package of claim 16 wherein the transparent membercomprises a first transparent member overlying a second transparentmember including the standoff region.
 29. The MEMS package of claim 16wherein the transparent member is characterized by a thickness rangingfrom about 0.1 mm to 1.2 mm.
 30. The MEMS package of claim 16 whereineach of the plurality of MEMS chips is maintained within an inertenvironment within one of the plurality of recessed regions.
 31. TheMEMS package of claim 16 wherein the inert environment is selected fromnitrogen, argon, or a mixture of nitrogen and argon.
 32. The MEMSpackage of claim 16 wherein each of the plurality of recessed regionscomprises a first surface region opposing a second surface region, atleast one of the first surface region or the second surface region beingcharacterized by a root mean square surface roughness of less than orequal to 2 Å for a 2 μm by 2 μm area.
 33. The MEMS package of claim 16wherein each of the plurality of recess regions has a depth of about 0.5mm and less.
 34. The MEMS package of claim 16 wherein the transparentmember comprises a first side and a second side, the first side beingparallel to the second side, the first side and the second side beingcoated with an antireflective material.
 35. The MEMS package of claim 16wherein each of the plurality of recessed regions has a peripheralregion that forms an aperture region overlying a portion of one of theplurality of MEMS chips.